Patents

  1. S.J.Cunningham and S.Tatic-Lucic; U.S. Patent #6,917,086, July 12, 2005, “Trilayered beam MEMS device and related methods”
  2. S.J.Cunningham, D.R. DeReus, S.Sett, and S.Tatic-Lucic; U.S. Patent #6,876,047, April 5, 2005, “MEMS device having a trilayered beam and related methods”
  3. S.J.Cunningham and S.Tatic-Lucic; U.S. Patent #6,746,891, June 8, 2004, “Trilayered beam MEMS device and related methods”